发明名称 Method of selectively depositing metal on a ceramic substrate with a metallurgy pattern
摘要 A liftoff process for selectively depositing additional metal layers on an existing metallurgy pattern supported on a dielectric substrate which includes the steps of (1) depositing a melt material on the dielectric substrate which material, after melting, has the characteristic of wetting the substrate surface, but not the existing metallurgy pattern, (2) heating the melt material to convert it to a liquid wherein the material is distributed to cover the dielectric substrate surface, but not the metallurgy pattern, (3) cooling the liquid material to solidify it, (4) depositing a blanket layer of metal over the solidified material and the metallurgy pattern, and (5) dissolving the solidified material in a suitable solvent thereby removing the material and the overlying metal layer portions.
申请公布号 US4206254(A) 申请公布日期 1980.06.03
申请号 US19790016033 申请日期 1979.02.28
申请人 INTERNATIONAL BUSINESS MACHINES CORP 发明人 SCHMECKENBECHER, ARNOLD F
分类号 H05K3/02;C04B41/51;C04B41/88;C23C14/04;G03F7/00;H01L21/48;H01L23/12;H05K1/03;H05K1/09;H05K3/24;(IPC1-7):B05D5/12;B05D1/32 主分类号 H05K3/02
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