| 摘要 |
PURPOSE:To enable efficient manufacture in a limited space, by providing a mechanism for mechanically carrying out the mounting and taking out of a mask and a panel so that the ionic nitriding of the mask is effected at one part of the transporting process of the panel. CONSTITUTION:After a panel 17 is set on a treatment base 61, air is exhausted by an oil pump 10 and introgen and hydrogen are supplied into the furnace from a gas- supplying section 11. On the other hand, cooling water is supplied via an inlet 8 to the cooling layer provided on the surface of the panel 17 and then it is sent out from an outlet 9. Next, a positive voltage is applied from a power supply 3 to the treatment base 61 and a mask-opposing-electrode 71, and a negative voltage is applied to a mask 2 via an electrode 41. Then, discharge occurs between the surface of the mask 2 and the mask-opposing-electrode 71 so that ionic nitriding reaction will take place. A temperature detecting section 13 measures the surface temperature of the mask 2 in the furnace for controlling the power supply voltage. The treatment is continued over a time period required to produce a necessary film thickness. Thus, efficient manufacturing process can be enabled without requiring no idle space. |
