| 摘要 |
PURPOSE:To obtain the magnetic recording media excellent in resolution and S/N with high density recording, by providing radiant ray sensing resin layer on the supporter, forming the fine holes less than average sub-microne on the layer with the same pitch, and filling in the magnetic substance in the holes. CONSTITUTION:The radiant ray sensing resin (PMMA or the like) layer 3 is provided on the polyimide film 2 on the glass ring 1, and patterning is made with electron beam e.g., about 0.9mu in diameter and pitch 0.7mu, and development is made, and after evaporating gold 4, the mask is obtained by trichlane processing and removing the layer 3. Next, PMMA layer 3' is placed on the support 7 providing the Al evaporating layer 6 on the Si substrate 5, the said mask is overlapped on it, X-ray exposure is made and development is made to form the fine holes 8 with the said diameter and pitch. Further, baking processing is made and the magnetic substance 9 is formed in the holes 8 with Fe-Ni plating by taking the Al layer 6 as the conductive layer. Vertical magnetic recording is also enabled by giving easy magnetization axis vertically for the magnetic substance to the film 3'. |
