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经营范围
发明名称
PATTERN INSPECTION METHOD
摘要
申请公布号
JPS5569005(A)
申请公布日期
1980.05.24
申请号
JP19780143097
申请日期
1978.11.20
申请人
FUJITSU LTD
发明人
ANDOU SANETOSHI;INAGAKI YUUSHI
分类号
G01B11/00;G01B11/02;G01B11/24
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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