SCANNING ELECTRONIC MICROSCOPE OR SIMILAR EQUIPMENT

摘要

PURPOSE:To improve S/N by providing a colimeter between the specimen and X- ray detector thereby lowering the background. CONSTITUTION:The electron beam 1 is irradiated through electromagnetic lens comprised of magnetic lens path 2 and lens coil 3 onto the specimen 4, to radiate X- ray 5 from the speciment 4. Said X-ray 5 is taken out from a hole made through the magnetic lens path 2. A colimeter 7 is located between the specimen 4 and X-ray detector 6 in energy distribution type X-ray analyzer system. Colimeter 7 has inner face composed of super light element material and outer face composed of material having large atomic number. X-ray produced from the specimen 4 and not effective to X-ray detector 6 is attenuated by colimeter 7.