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发明名称
METHODS OF USING CORPUSCULAR BEAM APPARATUS
摘要
申请公布号
GB1567635(A)
申请公布日期
1980.05.21
申请号
GB19760043153
申请日期
1976.10.18
申请人
SIEMENS AG
发明人
分类号
H01J37/04;H01J37/30;H01J37/302;(IPC1-7):H01J37/30
主分类号
H01J37/04
代理机构
代理人
主权项
地址
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