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发明名称
CVD-BESCHICHTUNGSVORRICHTUNG FUER KLEINTEILE
摘要
申请公布号
DE2849240(A1)
申请公布日期
1980.05.14
申请号
DE19782849240
申请日期
1978.11.13
申请人
SIEMENS AG
发明人
POLITYCKI,ALFRED,DR.-ING.;HIEBER,KONRAD,DR.RER.NAT.;STOLZ,MANFRED,ING.
分类号
C23C16/44;C23C16/455;(IPC1-7):C23C11/00;A61C1/05
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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