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发明名称
GANG BONDING DEVICE
摘要
申请公布号
JPS5562745(A)
申请公布日期
1980.05.12
申请号
JP19780135039
申请日期
1978.11.01
申请人
CHO LSI GIJUTSU KENKYU KUMIAI
发明人
NITSUTA MITSURU
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
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