| 摘要 |
PURPOSE:To realize a high-accuracy detection for the fixed slit width with which the calibration is carried out by calculating and then displaying the increment and decrement of the output value which varies in accordance with the operation of the slit driving mechanism. CONSTITUTION:The following component elements are provided: light source 10, photo detector 20, slit 60 capable of varying the slit width continuously, and slit driving mechansim 62 which varies the slit width each. The maximum output of detector 20 is memorized 64 when the slit width is fully opened via mechanism 62, and the slit width is detected 66 when the ratio features a fixed value between the maximum output and the output obtained through the shift of the slit width toward the closure direction. At the same time, the set slit width corresponding to the fixed value is memorized, and the output is set to the value corresponding to the set slit width at the moment when comparison detection 66 is given. After that, operation 74 is carried out to increase or decrease the fluctuation component of the output in accordance with the operation of mechanism 62, and the operation result is displayed 76. |
