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发明名称
Verfahren zum Herstellen von Kontaktbelichtungsmasken fuer Halbleiterzwecke
摘要
申请公布号
DE1622341(A1)
申请公布日期
1970.10.29
申请号
DE19681622341
申请日期
1968.01.18
申请人
SIEMENS AG
发明人
HERMANN STEGGEWENTZ,DIPL.-PHYS.
分类号
G03F1/00
主分类号
G03F1/00
代理机构
代理人
主权项
地址
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