| 摘要 |
PURPOSE:To obtain an excellent picture drawing while improving the dimensional precision of the picture; reducing its edge roughness; and shortening the radius of curvature of a corner portion by providing the dimension of an electron beam in such a manner that it is measured at a ratio of approx. 1:2 in a direction perpendicular to its scanning line. CONSTITUTION:An electron beam emitted from an electron gun 1 is led to pass through the anode 2 and converged 5 by a capacitor lens 4, then controlled by a blanking deflecting plate 6. The output beam is reconverged by a capacitor lens 8 and electrostatically deflected 9, before being scaled down and projected on a sample material 11 through an object lens 10. In this case, by providing the dimension of the electron beam in such a way that it is measured at a ratio of approx. 1:2 in a direction perpendicular to its scanning line, it becomes possible to increase the dimensional precision of the picture; reduce its edge roughness; and shorten the radius of the curvature of its corner portion, thus obtain an excellent picture drawing. |
