BAD FUER DIE ELEKTROPHORETISCHE ABLAGERUNG EINER ISOLIERBESCHICHTUNG AUF EINEM HALBLEITERKOERPER

摘要

For applying a protective coating to a semiconductive body, such as a wafer or chip with exposed junctions, the body is immersed in a bath in which particles of a passivant such as glass are suspended for electrophoretic deposition on the body surface. The bath consists essentially of an organic solvent such as acetone, an amine and a hydrohalogenic acid in proportions yielding a preferably alkalinic pH between 4 and 10.