发明名称 |
Article and device having an amorphous silicon containing a halogen and method of fabrication |
摘要 |
An amorphous silicon capable of the formation of a semiconductor junction. The amorphous silicon can be fabricated by a glow discharge in a gas atmosphere including hydrogen and a deposition gas. The deposition gas has therein the elements silicon and a halogen selected from the group consisting of chlorine, bromine and iodine.
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申请公布号 |
US4196438(A) |
申请公布日期 |
1980.04.01 |
申请号 |
US19760727659 |
申请日期 |
1976.09.29 |
申请人 |
RCA CORP |
发明人 |
CARLSON, DAVID E |
分类号 |
H01L31/04;C23C16/505;H01J29/45;H01L21/205;H01L21/28;H01L29/04;H01L29/167;H01L29/47;H01L29/872;H01L31/07;H01L31/10;H01L31/18;H01L31/20;(IPC1-7):H01L29/48;H01L27/14 |
主分类号 |
H01L31/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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