SUPPYING METHOD OF MIXED REACTION GAS FOR ETCHING,申请号JP19780113308-传众专利搜索

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发明名称	SUPPYING METHOD OF MIXED REACTION GAS FOR ETCHING
摘要
申请公布号	JPS5541918(A)	申请公布日期	1980.03.25
申请号	JP19780113308	申请日期	1978.09.14
申请人	FUJITSU LTD	发明人	NAKAMURA MORITAKA
分类号	C23F4/00;C23F1/00	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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