摘要 |
PURPOSE:To provide high frequency piezoelectric ceramics with a large electromechanical coupling factor by sintering with heat and pressure while regulating the composition, temperature, pressure, and treatment time, with respect to piezoelectric ceramics consisting of (PbTi.ZrO3)+MnO2. CONSTITUTION:In a composition expressed by (1-w) (PbTi1-z ZrzO3)+wMnO2, Z and w are defined within ranges of 0.48<=Z<=0.64 and 0.004<=w<=0.06, respectively. The sintering is effected with heat and pressure by keeping the treatment temperature at 1.050-1.300 deg.C, the pressure at 100-500kg/cm<2> and the treatment time for 0.5-24 hours. This enables to obtain piezoelectric ceramics for high frequency use having Poisson ratio of 1/3 or more and mechanical quality coefficient of 200 or more and a large electromechanical coupling factor, which can be processed into a sheet as thin as approximately 30mum. |