| 摘要 |
A discharge lamp of the type which seals mercury and a rare gas in a bulb having sealed therein a pair of electrodes and in which both the mercury and the rare gas contribute to discharge radiation. Letting the value of the quantity of mercury (mg/cc.) sealed per 1 cc. of the volume of the bulb and the value of the (atmospheric) pressure of the rare gas be represented by X and Y, respectively, the values X and Y are selected to be in the ranges of 1</=X</=13 and 2</=Y</=10, respectively, whereby to abundantly emit ultraviolet rays of the wavelengths between 2000 to 2500 A. The discharge lamp is employed as a light source for photolithography in the manufacture of semiconductor devices to achieve the formation of a fine pattern in a short time.
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