METHOD AND APPARATUS FOR DEPOSITING THIN LAYERS OF INSULATING OR HTLY CONDUCTIVE MATERIALS BY REACTIVE SPRAYING IN A HIGH-FREQUENCY CTIVE PLASMA

摘要

A method and apparatus for depositing thin layers of insulating or slightly conductive materials involves reactive spraying through high-frequency inductive plasma. The conductive component of the material to be deposited is sprayed in a first chamber through which an ionizable inert gas travels, the sprayed particles then passing through a second chamber in which a substrate is placed and to which a reactive gas is supplied. Insulating and weakly inductive materials such as oxides, carbide and nitrides may be deposited at a rate substantially comparable with the rate for conductive materials to obtain high qualify uniform deposits.