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发明名称
STORING TRAY FOR MEASURING OF SEMICONDUCTOR CHIP
摘要
申请公布号
JPS5521189(A)
申请公布日期
1980.02.15
申请号
JP19780095243
申请日期
1978.08.03
申请人
MITSUBISHI ELECTRIC CORP
发明人
ONO TAKASHI
分类号
H01L21/673;H01L21/66;H01L21/68
主分类号
H01L21/673
代理机构
代理人
主权项
地址
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