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发明名称
SUBSTRATE FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS5518038(A)
申请公布日期
1980.02.07
申请号
JP19780090784
申请日期
1978.07.24
申请人
NIPPON ELECTRIC CO
发明人
TSUYA HIDEKI
分类号
C30B25/18;H01L21/205;H01L21/84;H01L21/86;H01L27/12
主分类号
C30B25/18
代理机构
代理人
主权项
地址
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