| 摘要 |
PURPOSE:To increase the deposition efficiency of a magnetic material and to improve the magnetic properties of a deposited film, by inoizing a steam stream of the magnetic material that has been converged by a difusion preventing means, and converging the stream further in a desired direction by an electric field. CONSTITUTION:In a high vaccum casing 1, a magnetic material evaporation source 4 housed in a hearth 3 is heated by an electron beam heating source 5 to evaporate as a steam stream V. The steam stream V rises and is converged as shown by arrows by a partition wall member 9 that is heated to at least the evaporation temperature of the evaporation source 4 by a heating source 12 and by the steam stream diffusion preventing means 6 including a heat shield member 10 on which a cooling coil 11 is wound, and is ionized to become an ion beam by an ionization facilitating means 13 comprising a thermoelectron discharge source 14 and an ionization electrode 15, the evaporation distribution is converged by a reticular converging electrode 16, and the ion beam is directed at a desired angle toward a substrate 18, and the evaporated particles are deposited to form a thin film thereon. |
