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发明名称
VERFAHREN ZUR HERSTELLUNG VON HALBLEITERVORRICHTUNGEN UND VORRICHTUNG HIERFUER
摘要
申请公布号
DE2924702(A1)
申请公布日期
1980.01.31
申请号
DE19792924702
申请日期
1979.06.19
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO.,LTD.
发明人
SHIMANO,AKIO;TAKAGI,HIROMITSU
分类号
H01L21/3063;H01L21/311;H01L21/316;H01L21/329;H01L21/338;(IPC1-7):H01L21/306;H01L21/302
主分类号
H01L21/3063
代理机构
代理人
主权项
地址
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