| 摘要 |
PURPOSE:To obtain the resin sealing device for semiconductor element with which the driving direction of a plunger can be properly determined by a method wherein reciprocatory driving force is transmitted to the plunger using a flexible transfer member. CONSTITUTION:When the external bottom force 46 is coupled to the top force, an AC servo motor 22 is driven, and a ball screw shaft 33 is rotated through the intermediary of a coupling 32. A nut 39 advances in accordance with the rotation of the ball screw shaft 33. Consequently, a rod 40 is displaced into a sliding path 45a, and a plunger 43 is moved up by a chain 41. Then, a tablet 16 is press-inserted into the external bottom force 46 and the top force through the intermediary of the plunger 43. The direction of displacement of the plunger 43 can be brought to a suitable angle by properly setting the measurements of the circular arc of the chain 41 for the displacement in horizontal direction of the nut 39. |
