METHOD OF DETECTING END POINT OF ETCHING,申请号JP19780085029-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	METHOD OF DETECTING END POINT OF ETCHING
摘要
申请公布号	JPS5512725(A)	申请公布日期	1980.01.29
申请号	JP19780085029	申请日期	1978.07.14
申请人	CHO LSI GIJUTSU KENKYU KUMIAI	发明人	MATSUO TAKESHI;KINOSHITA HIROSHI
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

您可能感兴趣的专利

METHOD OF INCREASING DIELECTRIC STRENGTH OF METAL OXIDE TRANSISTOR AND CIRCUIT DEVICE

LUBRICATING MOLD RELEASE AGENT FOR HOT-FORGING ALUMINUM, AND METHOD FOR HOT-FORGING ALUMINUM THEREWITH

ROTARY CREEL OF PARTIAL WARPING MACHINE FOR PATTERN WARP AND PARTIAL WARPING MACHINE FOR PATTERN WARP

RECORDER, RECORDING MATERIAL, AND LIQUID JET DEVICE

MULTI-WHEEL HEELING APPARATUS

ELECTRIC CHAIN BLOCK

HOT PRESS MEMBER HAVING EXCELLENT DUCTILITY, STEEL SHEET FOR THE HOT PRESS MEMBER, AND METHOD FOR PRODUCING THE HOT PRESS MEMBER

METHOD OF MANUFACTURING MULTILAYER PRINTED WIRING BOARD

SEAT SLIDING DEVICE

IMAGING DEVICE AND METHOD OF CONTROLLING IMAGING DEVICE

LENS BARREL AND IMAGING APPARATUS

LIQUID DROPLET EJECTION DEVICE AND PROGRAM

OPTICAL MODULE AND OPTICAL TRANSMISSION METHOD

X RAY CT DEVICE

FILM FORMING APPARATUS AND FILM FORMATION METHOD

ELECTRONIC EQUIPMENT AND IMAGING APPARATUS

FLUORINE-CONTAINING BORONIC ACID ESTER COMPOUND, AND METHOD FOR PRODUCING THE SAME

IMAGE FORMATION DEVICE, IMAGE FORMATION CONTROL METHOD, IMAGE FORMATION CONTROL PROGRAM, AND RECORDING MEDIUM

EXPOSURE APPARATUS