摘要 |
In a magnetic bubble domain circuit, a conductive layer 13 on a garnet substrate 10 is etched to form conductor patterns. The grooves through the layer 13 are filled with an insulating material, e.g. a glass, 21, 22, 23, to provide a flat surface. Therefore when an insulating layer and patterned permalloy overlay 25 are subsequently provided, there are no steps in the overlay. This eliminates a source of defects and the uniform spacing of the overlay from the substrate results in better operating characteristics. The same technique, employing a flat surface, can be used in semiconductor circuits. <IMAGE> |