摘要 |
PURPOSE:To manufacture long length magnetic recording media having greater coersive force efficiently, by specifying the incident angle of vapor flow and the position of the evaporation source of ferro-magnetic material. CONSTITUTION:The vacuum vessel 1 is continuously exhausted from the vacuum exhaust system 2 and it is held at a suitable pressure with the variable leakage valve 3. Along the circumference of the cylindrical rotary scan 4, the base 5 consisting of macromolecular mold moves from the shaft 6 toward A and wound on the winding shaft 7 after evaporation. As auxiliarily shown in broken lines, the vapor flow 11 is limited within the angle viewing the can 4, and the evaporation material 9 filled in the water cooling copper herth 8 in which the normal g2 on the evaporation surface is shifted toward B from the normal g1 through the rotary center of the can 4, is collided and heated with accelerated electrons from the electron generating source 10. The vapor flow 11 generated is limited with the coating prevention plate 12, the incident angle theta0 is braught to the theta1 smaller than the 45 deg. of tilt evaporation, to form the ferro-magnetic layer on the base 5. |