| 摘要 |
PURPOSE:To secure a high-accuracy detection of the pressure by providing the large-thickness inner frame between the outer circumference attachment part and the center part where the strain gauge is provided. CONSTITUTION:Inner frame 13 featuring a thickness of 5 times as large as that of diaphragm part 12 is provided at the outer circumference of part 12 including strain gauge part 11, and furthermore part 14 featuring a thickness about equal to or smaller than diaphragm part 12 is provided around frame 13. Thus the outer circumference area of part 14 is used as attachment part 16 to substrate 15. As frame 13 features a higher rigidity than part 14, the external mechanical strain, the thermal strain and others are never given directly to strain gauge part 11. |
