| 摘要 |
PURPOSE:To increase an exposure speed when there is no drawing to be drawn in a standard section on a sample surface, by moving an electron ray projecting position to a standard section which contains the drawing to be drawn without waiting for the response (stabilizing) of a deflection system. CONSTITUTION:A control circuit 20 supplies an end signal to FF17 and a high speed information transmission controlling mechanism HSC9 each time one exposure ends in a certain standard section, then, the FF17 is reset and the HSC9 supplies and sets a new exposure starting signal. The HSC9 gives various instructions corresponding to the input information read out, via a memory 11 in a digital computer 12, from a disk 10 in which information necessary for exposure is accumulated. The HSC9 does not give a position signal for scanning a new large section to a single multi 19 and a DA converter 15 until all the small figures in a certain standard section are drawn and gives a new position signal when their drawing is finished. By so controlling standard section polarizing devices 6 and 7, a large division deflecting device 8 and the exposure time controlling circuit 20, high accuracy and super high speed exposure can be realized. |
