| 摘要 |
PURPOSE:To increase the laser output by arranging electrodes in an opposed relation to each other in a chamber where a laser gas is loaded and thereby increasing a discharging injection power. CONSTITUTION:A laser gas is sealed within a chamber 10 and electrodes 12, 12 are arranged in an opposed relation to each other within the chamber 10. When a high-frequency voltage is applied from a high-frequency power supply 9 to the electrodes 12, 12, the laser gas within the chamber 10 is excited to start oscillating by an optical resonator comprising a partial reflection mirror 3 and a total reflection mirror 4. By separating the chamber 10 partitioning between the air and the laser gas from the electrodes 12, 12, the voltage between the electrodes can be suppressed by, e.g., increasing a discharge electrode capacity by reducing the thickness of the dielectric body, thereby increasing the injected power for discharging and thus increasing the laser output. |
