SEMIICONDUCTOR BASE PLATE HEATING METHOD,申请号JP19780078596-传众专利搜索

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发明名称	SEMIICONDUCTOR BASE PLATE HEATING METHOD
摘要
申请公布号	JPS558002(A)	申请公布日期	1980.01.21
申请号	JP19780078596	申请日期	1978.06.30
申请人	FUJITSU LTD	发明人	HIYAMIZU SUKEHISA;SAKURAI TERUO
分类号	C30B23/06;H01L21/203;H01L21/26;H01L21/324	主分类号	C30B23/06
代理机构		代理人
主权项
地址

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