Dislocations free silicon single crystal pulling device - with seed crystal mounted on slide for lateral displacement by external motor

摘要

The zone melting device has rotating holders for the silicon bar and for the seed crystal inside a vacuum vessel. The bottom spindle for the seed crystal is mounted on a slide which can be shifted in a horizontal direction by a motor outside the vacuum vessel. This allows crystals of 5 in. dia. and more to be pulled without dislocatin formation. The shifting mechanism is simple and the vacuum sealing problems have been eased. The greater possible eccentricity also helps to more intimate mixing.