| 摘要 |
<p>PURPOSE:To securely recognize whether or not a semiconductor device exists even if semiconductor devices have been received not regulary on a tray and efficiently measure electric characteristics. CONSTITUTION:A tray with a plurality of semiconductor devices housed is set on a tray supply part 4. The semiconductor devices in the tray supply part 4 are sucked by a suction head 3 and carried to a measuring part 9 for measuring electrical characteristics. A tray recognizing part 8 has a camera 8b for picking up an image of an entire tray at a time and an existence position recognizing processing part 8a for recognizing positions of the semiconductor devices from the image obtained by the camera 8b and outputting this information to a control part 10. The control part 10 moves the suction head 10 only to positions where the semiconductor devices exist based on the information from the tray recognizing part 8. An irregular reflection board 12 is provided between a light source 11 for shedding light to the tray supply part 4 for obtaining the image by the camera 8b and the tray supply part 4, thereby casting irregularly reflected light on the tray supply part 4.</p> |
