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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS551109(A)
申请公布日期
1980.01.07
申请号
JP19780072930
申请日期
1978.06.16
申请人
FUJITSU LTD
发明人
ABIRU AKIRA
分类号
H01L21/768;H01L21/31;H01L21/316
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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