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发明名称
CHARGED BEAM DRAWING DEVICE
摘要
申请公布号
JPH08330207(A)
申请公布日期
1996.12.13
申请号
JP19950131979
申请日期
1995.05.30
申请人
TOSHIBA CORP
发明人
SAITO MASATO;TAMAMUSHI SHUICHI
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
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