发明名称 Die bonding method utilizing rotary wafer table
摘要 An array of semiconductor components, comprising a first plurality of semiconductor components and a second plurality of semiconductor components held on a carrier, is bonded onto one or more substrates. The first plurality of semiconductor components is first located for pick-up by a transfer device, and each semiconductor component comprised in the first plurality of semiconductor components is picked up with the transfer device and is bonded onto a respective bonding position on the one or more substrates. After the first plurality of semiconductor components have been picked up and bonded, the carrier is rotated and the second plurality of semiconductor components is located for pick-up by the transfer device. Thereafter, each semiconductor component comprised in the second plurality of semiconductor components is picked up with the transfer device and is bonded onto a respective bonding position on the one or more substrates.
申请公布号 US8633089(B2) 申请公布日期 2014.01.21
申请号 US201113072869 申请日期 2011.03.28
申请人 NG MAN CHUNG;CHAU KEUNG;ASM ASSEMBLY AUTOMATION LTD 发明人 NG MAN CHUNG;CHAU KEUNG
分类号 H01L21/00;H01L21/30;H01L21/46;H01L21/66 主分类号 H01L21/00
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