| 摘要 |
PURPOSE:To produce a color indicator part with no stepwise difference in thickness by preparing a color indicator part on the transparent conductive membrane that is formed on a transparent substrate through reduction of the part to be formed in an indicator part by means of hydrogen plasma. CONSTITUTION:Each surface of an indium tin oxide transparent conductive membrane(ITO membrane) formed on a transparent glass substrate, an antimony- added tin oxide transparent conductive membrane (SnO2:Sb membrane), and a fluorine-added tin oxide transparent membrane (SnO2:F membrane) is covered with aluminum mask and mounted on a transparent, conductive substrate, holding device to be exposed to radiation of ECR hydrogen plasma. By this radiation all of the ITO, SnO2:Sb and SnO2:F membranes undergo a significant reduction in their light transmission factors with no notable change in their surface resistance values. Numerically a color indicator spot is reduced in thickness but the reduction is so small that the grade of stepwise difference associated with it is ignorable. |
