| 摘要 |
<p>PURPOSE:To obtain an accurate expansion state at all times by detecting the degree of expansion of the semiconductor substrate space caused by expansion of the heat expandable sheet at the utmost outer edge position of the substrate and then stopping the expansion. CONSTITUTION:Heat expandable sheet 3 with semiconductor element 1 stuck is applied to fixture ring 7, and up-down movable ring 11 is provided to the lower side of sheet 3. When axle 9 is raised up after heating sheet 3, the space of element 1 is expanded by extension of sheet 3, and the element at the utmost outer edge moves above photo sensor 12 and 13 to cut off the light. At this moment the photoelectric signal disappears, the rising of axle 9 is stopped to end the expansion. After this, ring 14 is fitted to ring 11 to fix sheet 3. Ring 11 is detachable from support part 10. In such constitution, an accurate expansion state is secured at all times with elimination of the uneven expansion, and also the pickup can be prevented for the adjacent elements.</p> |
