| 摘要 |
Adherent metal coatings<=5μ thick. are produced on polymer films by ionized cluster vapor deposition. The coating thickness is increased by subsequent conventional vapor deposition. The composite is suitable for printed elec. circuit prodn. The app. operates at 200-2000OC and 10-4-10-7 Torr by using 0.1-10KV d.c. at 10-300mA. Thus, a 3μ thick Cu coating was deposited on a 75μ thick polyester film by ionized cluster vapor deposition. The coated film had a bending endurance of 500 cycles, dielec. const. 3.0 after etching, and adhesion strength 1.2kg/cm.
|
