发明名称 |
Point scattering detector |
摘要 |
A beam analyzing system using a point scattering detector in conjunction with the standard secondary electron collector and imaging system of a scanning electron microscope. The detector consists of a sharp metal (preferably tungsten) tip located centrally in a biased aperture assembly mounted in the specimen stage. By scanning the image within the aperture and collecting the secondary electrons scattered from a controlled region of the tip, the electron beam intensity can be obtained and reconstructed on a display screen.
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申请公布号 |
US4179609(A) |
申请公布日期 |
1979.12.18 |
申请号 |
US19780885295 |
申请日期 |
1978.03.10 |
申请人 |
RAMACHANDRAN, KOVILVILA N;SEWELL, PETER B |
发明人 |
RAMACHANDRAN, KOVILVILA N;SEWELL, PETER B |
分类号 |
G01Q30/04;G01Q70/10;G01Q70/14;G01T1/29;H01J37/244;(IPC1-7):G01N27/00 |
主分类号 |
G01Q30/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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