| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a position detecting device, etc., for accurate alignment through a simple configuration or process, to quickly detect an output intensity of an aligning light source, or the intensity of alignment illuminating light. SOLUTION: For a position detecting device wherein light sources 5 and 6 for emitting the lighting light poured on the mark on an object, and photodetecting parts 7 and 8 for photodetecting the light generated at the mark are provided for detecting the position information of the mark, based on the signal outputted from the photodetecting parts 7 and 8, a light intensity calculation part CAL which calculates the intensity of the lighting light based on the output signal form the photodetecting parts 7 and 8, and a comparison calculation part CMP for comparing the calculated light intensity to a specified value are provided.</p> |
