发明名称 Lid for use in ion beam assisted deposition
摘要 A lid includes a first surface defining a cavity, a first joint defining an inlet, a second joint defining an outlet, a center hole communicating with the inlet, a circular channel communicating with the outlet and extending along a periphery of the first surface, and a number of branch channels radially extending from the center hole to the circular channel. The first surface includes a screen plate retained within the cavity, capable of letting the side-effect particles adhere thereon. Each of the plurality of branch channels communicates with the center hole and the circular channel, allowing liquid of a predetermined temperature to circulate within the lid.
申请公布号 US8714392(B2) 申请公布日期 2014.05.06
申请号 US201213420552 申请日期 2012.03.14
申请人 PEI SHAO-KAI;HON HAI PRECISION INDUSTRY CO., LTD. 发明人 PEI SHAO-KAI
分类号 B65D51/00;B65D6/40;B65D25/28 主分类号 B65D51/00
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