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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS54158868(A)
申请公布日期
1979.12.15
申请号
JP19780068472
申请日期
1978.06.06
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
YOSHINO MASARU
分类号
H01L21/3213;H01L21/302;H01L21/3065
主分类号
H01L21/3213
代理机构
代理人
主权项
地址
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