| 摘要 |
PURPOSE:To obtain a shape of a convex lens by means of a simple treatment by a method wherein one surface of an InP substrate is shaped to be a shape that two or more cylinders whose diameters are gradually reduced nearly coincide with their center and are piled up, this substrate is heat-treated in a hydrogen atmosphere containing a vapor of phosphorus and, after that, a multilayer structure composed of InP/InGaAsP is formed on the other surface of the substrate. CONSTITUTION:One surface of an InP substrate is shaped to be a shape that two or more cylinders whose diameters are gradually reduced nearly coincide with their center and are piled up. Then, said InP substrate 1 is heat-treated in a hydrogen atmosphere containing a vapor of phosphorus. Then, a multilayer structure composed of InP and InGaAsP is formed on the other surface of said InP substrate 1. For example, a selective etching operation is repeated on one surface of an InP substrate 1 by using an SiO2 film 16 as a mask; a step-shaped protruding part is formed. Then, this assembly is heat-treated at 800 deg.C for two hours in a hydrogen atmosphere having a vapor pressure of phosphorus; a partially spherical protruding part 18 is formed. After that, a liquid phase epitaxy operation is executed to the other surface of the substrate 1; necessary electrodes 5, 7 are formed; an LED provided with a lens is formed. |
