| 摘要 |
PROBLEM TO BE SOLVED: To provide an excimer laser or molecular laser system which can stabilize state of a mixed gas in a discharge chamber by accurately and periodically deciding the state. SOLUTION: The mixed gas in a discharge chamber 1 of a laser contains a halogen component, containing the molecules of such a chemical species as F2, HCl, etc., that is apt to deplete from the initial concentration. When the mixed gas is activated by means of a pulse discharge circuit 6, amplified spontaneous emission(ASE) signals are monitored. The state of the mixed gas is decided, based on the monitored ASE signals. Induced emission is preferably filtrated or interrupted so as to monitor the ASE signals more accurately. The mixed gas is replenished by using, preferably, micro-halogen injection, total pressure adjustment, mini-gas exchange, and partial gas exchange, based on the progress state of the mixed gas decided from the monitored ASE signals.
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