| 摘要 |
A variable capacitance dual pressure sensor for sensing the pressure levels of a pair of fluids independently comprises an enclosure having a top wall and a bottom wall, and a substrate of dielectric material having a first major surface facing the top wall and a second major surface facing the bottom wall. A first electrode is affixed to a portion of the first major surface and a second electrode is affixed to a portion of the second major surface. A first flexible electrically conductive diaphragm is sealed to the first major surface of the substrate and is spaced from the first electrode to form therewith the plates of a first capacitor and a second flexible electrically conductive diaphragm is sealed to the second major surface of the substrate and is spaced from the second electrode to form therewith the plates of a second capacitor. The first and second diaphragms are electrically coupled together to form a common connection. The substrate is sealably mounted within the enclosure forming therewith a first chamber external to the first diaphragm for receiving a first fluid and a second chamber external to the second diaphragm for receiving a second fluid.
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