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经营范围
发明名称
MANUFACTURE FOR SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS54156488(A)
申请公布日期
1979.12.10
申请号
JP19780064334
申请日期
1978.05.31
申请人
HITACHI LTD
发明人
HIGUCHI HISAYUKI
分类号
H01L21/3205;H01L21/283;H01L21/76
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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