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发明名称
STEPPED ETCHING METHOD
摘要
申请公布号
JPS54156178(A)
申请公布日期
1979.12.08
申请号
JP19780065217
申请日期
1978.05.30
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
TAKASE YOSHIHISA;KOJIMA KUNIO
分类号
H05K3/04;B26D1/02;C23F1/00;G03F1/00;G03F1/68;G03F1/80;H05K3/06
主分类号
H05K3/04
代理机构
代理人
主权项
地址
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