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发明名称
VERFAHREN ZUM TROCKENAETZEN VON ALUMINIUM UND ALUMINIUMLEGIERUNGEN
摘要
申请公布号
DE2922791(A1)
申请公布日期
1979.12.06
申请号
DE19792922791
申请日期
1979.06.05
申请人
HITACHI,LTD.
发明人
IIDA,SHINYA;UEKI,KAZUYOSHI;KOMATSU,HIDEO;MIZUTANI,TATSUMI
分类号
C09K13/10;C23F4/00;H01L21/02;H01L21/302;H01L21/3065;H01L21/3213;(IPC1-7):C23C15/00
主分类号
C09K13/10
代理机构
代理人
主权项
地址
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