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发明名称
LIQUID PHASE GROWTH
摘要
申请公布号
JPS54153784(A)
申请公布日期
1979.12.04
申请号
JP19780062563
申请日期
1978.05.24
申请人
OMRON TATEISI ELECTRONICS CO
发明人
FUJIMOTO AKIRA;SHIMURA MIKIHIKO;TAKEUCHI TSUKASA;KOIDE MASANOBU
分类号
C30B19/00;C30B29/40;C30B29/42;H01L21/208
主分类号
C30B19/00
代理机构
代理人
主权项
地址
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