Back-scattered electron detector for use in an electron microscope or electron beam exposure system to detect back-scattered electrons

摘要

A back-scattered electron detector for use in an electron microscope of an electron beam exposure system for detecting back-scattered electrons from a specimen includes a transparent plate employed as a light transmitting guide, and a part of the plate having a plastic scintillator coated thereon which emits light outputs in accordance with the back-scattered electrons. Gratings are provided at the scintillator part of the plate to reflect the emitted light outputs so as to be transmitted to a photo-electric convertor at the end of the plate. An aluminum layer is coated on the outside surface of the transparent plate for increasing light reflecting efficiency thereof.