发明名称 PHOTORESIST SEPARATOR CONTAINING NO PHENOL AND CHLORINATED HYDROCARBON
摘要 Stripping solutions, free from phenol and chlorinated hydrocarbon compounds, comprising a surfactant alkylarylsulfonic acid having 12-20 carbons, a hydrotropic aromatic sulfonic acid having 6-9 carbons and optionally a halogen-free aromatic hydrocarbon solvent with a boiling point above 150 DEG C. The solution can also contain a halogen-free aliphatic hydrocarbon solvent. The stripping compositions effectively remove organic polymeric substances e.g. photoresists, paints, varnishes, and fluxes, from inorganic substrates and are substantially clear water rinsable.
申请公布号 JPS54153577(A) 申请公布日期 1979.12.03
申请号 JP19790063155 申请日期 1979.05.22
申请人 ALLIED CHEM 发明人 JIYON EDOWAADO BANDAA MEI
分类号 C09K3/00;C11D1/22;C11D3/34;C11D3/43;G03F7/42;H01L21/027;H01L21/30 主分类号 C09K3/00
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